Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.252-252
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- 2008
The characteristics of polycrystalline 3C-SiC microhotplates for high temperature M/NEMS
고온 M/NEMS용 3C-SiC 마이크로 히터 특성
- Jeong, Jae-Min (School of Electrical Eng., University of Ulsan) ;
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Chung, Gwiy-Sang
(School of Electrical Eng., University of Ulsan)
- Published : 2008.11.06
Abstract
The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a