Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.250-250
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- 2008
Fabrication and characterization of polycrystalline 3C-SiC mocro-resonators
다결정 3C-SiC 마이크로 공진기 제작과 그 특성
- Lee, Tae-Won (School of Electrical Eng., University of Ulsan) ;
- Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
- Published : 2008.11.06
Abstract
This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The