Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.247-247
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- 2008
Effect of thermal annealing on optical and electrical properties of VOx deposited by magnetron sputtering
마그네트론 스퍼터링법으로 증착한 VOx 박막의 열처리에 따른 광학적.전기적 특성 변화
- Kong, Young-Joo (Sungkyunkwan Univ.) ;
- Park, Yong-Seob (Sungkyunkwan Univ.) ;
- Park, Jae-Wook (Sungkyunkwan Univ.) ;
- Lee, Sung-Uk (Sungkyunkwan Univ.) ;
- Hong, Byung-You (Sungkyunkwan Univ.)
- Published : 2008.11.06
Abstract
In this work, VOx thin films have been deposited by DC magnetron sputtering method on glass substrate using argon and oxygen gases. We examined the effects of the post annealing temperature on the structural, optical, and electrical variations of VOx films. The films were annealed at temperatures ranging from 300 to