The development of the highly efficient Circular Nozzle Source by using a study on the flux distributions of nozzle type thermal evaporation sources

We studied the properties of vapor flux distributions of nozzle shaped thermal evaporation sources and the factors, which can change the flux distributions such as nozzle structure. We used a simulation and experiment methods for this study. By using the results of our study, we improved the Circular Nozzle Source, which can make uniform thin films without substrate rotation, into more efficient source.