Relationship between Exo-electron Emission Currents and Glow Discharge Delay of ACPDP

  • Hong, Cho-Rong (Dept. of Materials science and Engineering, Hongik University) ;
  • Yoon, Sang-Hoon (Dept. of Materials science and Engineering, Hongik University) ;
  • Kim, Yong-Seog (Dept. of Materials science and Engineering, Hongik University)
  • 발행 : 2008.10.13

초록

The effects of wall charge and bias voltage on exo-electron emission currents were examined. In addition, the effects of doping elements on the currents were investigated. These results indicated that the statistical delay is inversely proportional to the exo-electron emission currents measured.

키워드