한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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- Pages.218-221
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- 2008
Bottom Gate Microcrystalline Silicon TFT Fabricated on Plasma Treated Silicon Nitride
- Huang, Jung-Jie (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Chen, Yung-Pei (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Lin, Hung-Chien (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Yao, Hsiao-Chiang (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Lee, Cheng-Chung (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI))
- 발행 : 2008.10.13
초록
Bottom-gate microcrystalline silicon thin film transistors (