한국정보디스플레이학회:학술대회논문집
- 2008.10a
- /
- Pages.218-221
- /
- 2008
Bottom Gate Microcrystalline Silicon TFT Fabricated on Plasma Treated Silicon Nitride
- Huang, Jung-Jie (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Chen, Yung-Pei (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Lin, Hung-Chien (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Yao, Hsiao-Chiang (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI)) ;
- Lee, Cheng-Chung (Department of Thin-film Transistor Technology, Display Technology Center, Industrial Technology Research Institute (DTC/ITRI))
- Published : 2008.10.13
Abstract
Bottom-gate microcrystalline silicon thin film transistors (