광학적 두께 제어 방법에 따른 광학박막필터의 에러보상효과에 대한 비교

Comparison of Optical Monitoring Methods for Deposition of the Optical Thin-film Filters

  • 발행 : 2008.07.01

초록

In this study, we present the error compensation effect of optical monitoring methods for apply of narrow band pass filter and IR-cutoff filter. Then we show the optimization process for apply of optical monitoring methods.

키워드