Comparison of Optical Monitoring Methods for Deposition of the Optical Thin-film Filters

광학적 두께 제어 방법에 따른 광학박막필터의 에러보상효과에 대한 비교

In this study, we present the error compensation effect of optical monitoring methods for apply of narrow band pass filter and IR-cutoff filter. Then we show the optimization process for apply of optical monitoring methods.