Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- 2008.10a
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- Pages.640-643
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- 2008
Mesh Patterned High Tunable MIM Capacitor
- Lee, Young-Chul (Division of Marine Electronics and Communication Engineering, Mokpo National University)
- 이영철 (목포해양대학교)
- Published : 2008.10.31
Abstract
In this work, a novel tunable MIM capacitor with the meshed electrode is proposed first in order to improve the tunability characteristics using fringe fields. The capacitors were fabricated on a low-resistivity Si substrate employing lead zinc niobate (PZN) thin film dielectric. The fabricated capacitor with the meshed electrode, whose line width and spacing was