Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.10a
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- Pages.129-130
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- 2008
Optimization for Fused Quartz DRIE using Taguchi Method
다구치 방법을 이용한 비정질 수정 건식 식각 최적화
- Song, Eun-Seok (Seoul National University) ;
- Jung, Hyung-Kyun (Seoul National University) ;
- Hwang, Young-Seok (Seoul National University) ;
- Hyun, Ik-Jae (Chung Ang University) ;
- Kim, Yong-Kwon (Seoul National University) ;
- Beak, Chang-Wook (Chung Ang University)
- Published : 2008.10.31
Abstract
In this paper, optimal DRIE process conditions for fused quartz are experimentally determined by Taguchi method to develop high-performance inertial sensors based on the fused quartz material, which is known to have high Q-factors. Using Si layer as an etch mask, which was formed by previously developed bonding process of the fused quartz and Si wafer, fused quartz DRIE process was performed. Different 9 flow rate conditions of
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