대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2008년도 추계학술대회A
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- Pages.1902-1907
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- 2008
마이크로채널에서의 국소 열전달 측정
Local heat transfer measurement inside microchannel
초록
The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.
키워드