Fabrication of Ultra Sensitive Cantilevers with Nb Superconducting Annulus Thin Film

  • Kim, Y.W. (Korea University) ;
  • Lee, S.G. (Korea University) ;
  • Choi, J.H. (Korea Research Institute of Standards and Science) ;
  • Lee, K.C. (Korea Research Institute of Standards and Science)
  • Published : 2008.08.01