응력 분포에 따른 압전 유니모프 작동기의 성능 평가

Performance Evaluation for Piezoelectric Unimorph Actuator with Stress Distribution

This paper deals with the performance evaluation of piezoelectric unimorph actuator. In the unimorph design, the thickness ratio of substrate to piezoelectric material and the elastic modulus ratio of substrate to piezoelectric material are important parameters. There exists only one structural configuration that satisfies the optimal condition among them, and actuators using that configuration exhibit better actuating displacements. Another design parameter is the piezoelectric coefficient which can be improved due to the induced tensile stress and voltages. The application of the tensile stress to the piezoelectric material makes it get higher piezoelectric coefficient and the total displacement performance of the unimorph actuator is improved. Finally, the piezoelectric actuator system with spring elements is fabricated and it shows higher actuating displacement capability.