Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.11a
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- Pages.111-112
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- 2008
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- 2005-8446(pISSN)
Self-Calibration of a Piezoelectric Actuator Based Nanopositioner
피에조 스텍을 이용한 나노 포지셔너의 셀프-캘리브레이션
- Jeong, Y.H. ;
- Ferreira, P.M. (Dept. MechSE, University of Illinois at Urbana Champaign) ;
- Yun, W.S.
- Published : 2008.11.12