대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.2241-2242
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- 2008
펜듈럼 구조체 제작을 위한 TMAH 습식 식각 시 모서리 보상에 관한 연구
A study on the corner compensation in anisotropic TMAH etching for pendulum structure
- Han, Kyu-Sung (Division of Electrical & Computer Engineering, Ajou university) ;
- Lee, Ki-Jung (Division of Electrical & Computer Engineering, Ajou university) ;
- Park, Sin-Wook (Division of Electrical & Computer Engineering, Ajou university) ;
- Yang, Sang-Sik (Division of Electrical & Computer Engineering, Ajou university)
- 발행 : 2008.07.16
초록
Anisotropic TMAH etching is key processing step for the fabrication of pendulum structure. During the etching, convex corners are attacked, and a proper compensating structure design is required when fabricating pendulum structures with sharp convex corner. In this paper, we present four compensation structures for convex corner compensation with 30% wt TMAH-water solution at
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