A study on the corner compensation in anisotropic TMAH etching for pendulum structure

펜듈럼 구조체 제작을 위한 TMAH 습식 식각 시 모서리 보상에 관한 연구

Anisotropic TMAH etching is key processing step for the fabrication of pendulum structure. During the etching, convex corners are attacked, and a proper compensating structure design is required when fabricating pendulum structures with sharp convex corner. In this paper, we present four compensation structures for convex corner compensation with 30% wt TMAH-water solution at $89\pm1^{\circ}C$ temperature, and observe the etched convex corner by optical microscope. we compare the result of calculations and experiments about four convex corner compensation patterns.