대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

순환적 WLS를 이용한 헤테로다인 레이저 간섭계의 비선형 오차 보정

Nonlinearity error compensation in heterodyne laser interferometer using recursive WLS

  • 김대현 (성균관대학교, 정보통신공학부) ;
  • 허건행 (성균관대학교, 정보통신공학부) ;
  • 유관호 (성균관대학교, 정보통신공학부)
  • Kim, Dae-Hyun (SungkyunKwan University, School of Information and Communication Engineering) ;
  • Heo, Gun-Haeng (SungkyunKwan University, School of Information and Communication Engineering) ;
  • You, Kwan-Ho (SungkyunKwan University, School of Information and Communication Engineering)
  • 발행 : 2008.07.16
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초록

The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.

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