대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.1482-1483
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- 2008
초소형 수동형 유체 압력 조정기 제작 및 실험
Fabrication and Test of a Micro Passive Liquid Pressure Regulator
- Lee, Ki-Jung (Ajou University) ;
- Lim, In-Ho (Ajou University) ;
- Sim, Woo-Young (Ajou University) ;
- Yang, Sang-Sik (Ajou University)
- 발행 : 2008.07.16
초록
This report describes the design, fabrication and experimental results of an implantable micro pressure regulator. It consists of three silicon substrates, a glass substrate, and a PDMS layer. Silicon and glass substrates are fabricated by using bulk micro machining and sandblasting. The PDMS layer is used as a intermediate layer for Si-Si and Si-glass bonding processes. This micro regulator is a key component of the portable drug delivery systems for low power consumption. The device has some advantages, such as a passive type device, no power consumption, and simple structure.
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