Fabrication and Test of a Micro Passive Liquid Pressure Regulator

초소형 수동형 유체 압력 조정기 제작 및 실험

This report describes the design, fabrication and experimental results of an implantable micro pressure regulator. It consists of three silicon substrates, a glass substrate, and a PDMS layer. Silicon and glass substrates are fabricated by using bulk micro machining and sandblasting. The PDMS layer is used as a intermediate layer for Si-Si and Si-glass bonding processes. This micro regulator is a key component of the portable drug delivery systems for low power consumption. The device has some advantages, such as a passive type device, no power consumption, and simple structure.