Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1254-1255
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- 2008
Optical properties of the Al:ZnO transparent conducting oxide films prepared by DC/RF
DC/RF 마그네트론 스퍼터링으로 제작한 Al:ZnO 투명전도성 산화막의 광학적 특성
Abstract
Low cost TCO(Transparent Conductive oxide) thin films were prepared by 6" DC/RF magnetron sputtering systems. For the AZO preparation processes a 99.99% AZO target (Zn: 98 wt.%,
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