대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

티타늄 카바이드가 코팅된 탄소나노튜브 미세팁 이미터의 전계방출 특성 분석

Characterization of microtip emitters based on titanium carbide-coated carbon nanotubes

  • 김영광 (한양대학교 전자전기제어계측 공학과) ;
  • 김종필 (한양대학교 전자전기제어계측 공학과) ;
  • 박창균 (한양대학교 전자전기제어계측 공학과) ;
  • 박진석 (한양대학교 전자전기제어계측 공학과)
  • Kim, Young-Kwang (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, HanYang University) ;
  • Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, HanYang University) ;
  • Park, Chang-Kyun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, HanYang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, HanYang University)
  • 발행 : 2008.07.16
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초록

Thin films (< 30 nm) of titanium carbide (TiC) are coated on carbon nanotubes (CNTs), which are directly grown on nano-sized ($\sim$ 500 nm in diameter) conical-type tungsten (W) tips, by employing an inductively coupled plasma-chemical vapor deposition (ICP-CVD) technique. Any modification in structural properties (such as length to diameter ratio, crystal quality, and growth behavior) of CNTs due to TiC-coating has been monitored by using high-resolution TEM, field-emission SEM, and Raman spectroscopy. Driving voltage for obtaining the same level of emission current in CNTs-emitter is significantly reduced by TiC-coating. It is also worthy of being noted that the degradation of emission current due to prolonged operation (up to 30 h) is remarkably suppressed by TiC-coating.

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