대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2008년도 제39회 하계학술대회
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- Pages.1150-1151
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- 2008
자기중성방전 스퍼터에 의한 DSCs용 ITiO 박막제작
ITiO films prepared by magnetic null discharge sputtering for DSCs application
- Han, Deok-Woo (Department of Electrical and electronic Engineering, Kyungsung University) ;
- Endrowednes, Kuantama (Department of Electrical and electronic Engineering, Kyungsung University) ;
- Kwak, Dong-Joo (Department of Electrical and electronic Engineering, Kyungsung University) ;
- Sung, Youl-Moon (Department of Electrical and electronic Engineering, Kyungsung University)
- 발행 : 2008.07.16
초록
Titanium-doped indium oxide (ITiO) films were prepared on soda-lime glass substrate using a magnetic null discharge (MND) sputter source. The ITiO thin films containing 10 wt.% Ti showed the minimum resistivity of
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