Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Development of Metal nano Powder Imprinting Process for Fabrication of Conductive Tracks

금속 배선 제작을 위한 메탈 나노 파우더 임프린팅 공정기술 개발

  • 김진수 (연세대학교 대학원 기계공학과) ;
  • 김호관 (연세대학교 대학원 기계공학과) ;
  • 임지석 (연세대학교 대학원 기계공학과) ;
  • 배형대 (연세대학교 대학원 기계공학과) ;
  • 최민석 (연세대학교 대학원 기계공학과) ;
  • 강신일 (연세대학교 기계공학부)
  • Published : 2007.05.10
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Abstract

A method for metal nano powder imprinting is proposed as a patterning process for conductive tracks that is inexpensive and scalable down to the nanoscale. Conductive tracks with line widths of $0.5{\sim}20{\mu}m$ were fabricated using this method. The processing conditions were optimized to avoid various types of defects, and to increase the degree of sintering and electric conductivity of the imprinted conductive tracks. The mean electric resistivity of the conductive tracks imprinted under optimum conditions was $8.95{\mu}{\Omega}{\cdot}cm$, which is in the range required for practical applications.

Keywords