Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2007.06a
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- Pages.208-208
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- 2007
An Experiment on Evaluation of a Heat Recovery Type Air Washer System for Semiconductor Manufacturing Clean Rooms
반도체 클린룸용 열회수식 에어와셔 시스템의 평가 실험
- Park, Sang-Tae (Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
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Yoo, Kyung-Hoon
(Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
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Yeo, Kuk-Hyun
(Aerosol and Contamination Control Labortary, Korea Institute of Industrial Technology) ;
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Tae, Kyung-Eung
(Research & Development Center, Daehan PNC) ;
- Son, Seung-Woo (Research & Development Center, Sunglim PS)
- 박상태 (한국생산기술연구원 에어로졸.오염제어 연구실) ;
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유경훈
(한국생산기술연구원 에어로졸.오염제어 연구실) ;
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여국현
(한국생산기술연구원 에어로졸.오염제어 연구실) ;
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태경응
((주)대한피엔씨) ;
- 손승우 ((주)성림피에스)
- Published : 2007.06.20
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