Thickness effect of a Ge interlayer on the formation of nickel silicides

  • Choe, Cheol-Jong (IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute (ETRI)) ;
  • Jang, Seo-Yong (Materials Engineering Group, Korea Electric Power Research Institute (KEPRI)) ;
  • Lee, Seong-Jae (Department of Physics, Hanyang University) ;
  • Ok, Yeong-U (Department of Materials Science and Engineering, Korea University) ;
  • Seong, Tae-Yeon (Department of Materials Science and Engineering, Korea University)
  • Published : 2007.05.31