Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2007.04a
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- Pages.73-73
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- 2007
Oxidation of BON and Si-DLC Thin Films deposited by Plasma Enhanced CVD method
Plasma Enhanced CVD 법으로 증착한 BON박막과 Si-DLC 박막의 산화
- Published : 2007.04.05
Abstract
Amorphous BON and Si-DLC thin films were synthesized by the RF plasma enhanced CVD method, and their oxidation behavior was studied up to
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