Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2007.04a
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- Pages.24-25
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- 2007
Fabrication of 70nm-sized metal patterns on flexible PET Film using nanoimprint lithography
- Lee, Heon (Dept. Mater. Sci. & Eng, Korea Univ.) ;
- Lee, Jong-Hwa (Dept. Mater. Sci. & Eng, Korea Univ.)
- Published : 2007.04.05
Abstract
Nano-sized metal patterns were successfully fabricated on flexible PET substrate using nanoimprint lithography. 70nm line and space PMMA resist pattern was formed on PET substrate without residual layer by "partial filling effect' and 20nm thin Cr metal layer was deposited by e-beam evaporation. Then, PMMA resist was selectively removed by acetone and 70nm narrow Cr pattern was formed.
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