Proceedings of the Korea Contents Association Conference (한국콘텐츠학회:학술대회논문집)
- 2007.11a
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- Pages.804-806
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- 2007
Resistivity Analysis to Deposition Parameters of Piezoelectric Thin Film
압전 박막의 증착변수에 따른 비저항 분석
Abstract
C-axis oriented zinc oxide thin films were deposited on Si(100) substrate by rf magnetron sputtering. The effects of deposition parameters on the crystallinity and electrical properties of ZnO films were investigated. As-deposited ZnO films showed the strong c-axis growth andexcellent crystallinity under the deposition conditions as follows ; substrate temperaturec :
ZnO박막을 c-축 방향으로 실리콘(Si 100)기판 위에 rf 마그네트론 스퍼터링 법으로 증착 하였고, 증착변수가 박막의 결정학적, 전기적 특성에 미치는 영향을 연구하였다. 기판온도
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