Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2007.11a
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- Pages.19.1-19.1
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- 2007
Metal Thin film Prepared by Atomic Layer Deposition for Contact Application of Nanoscale Device
- Bang, Seong-Hwan (POSTECH) ;
- LeeHan, Bo-Ram (POSTECH) ;
- Kim, Hyeong-Jun (POSTECH)
- Published : 2007.11.02