한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제33회 하계학술대회 초록집
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- Pages.309-309
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- 2007
The electrical properties of NVM with Si nanocluster formed by a pulse-type gas feeding technique in the LPCVD system
- Kim, Kyong-Min (Department of Nano Science & Technology, University of Seoul) ;
- Kim, Eun-Kyeom (Department of Nano Science & Technology, University of Seoul) ;
- Kim, Jeong-Ho (Department of Nano Science & Technology, University of Seoul) ;
- Son, Dae-Ho (Department of Nano Science & Technology, University of Seoul) ;
- Bae, Myeong-Wook (Department of Physics, University of Seoul) ;
- Koo, Hyun-Mo (Department of Nano Science & Technology, University of Seoul) ;
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Cho, Won-Ju
(Department of Electronic Materials Engineering, Kwangwoon University) ;
- Han, Moon-Sup (Department of Physics, University of Seoul) ;
- Won, Sung-Hwan (Department of Nano Science & Technology, University of Seoul) ;
- Hong, Wan-Shick (Department of Nano Science & Technology, University of Seoul) ;
- Sok, Jung-Hyun (Department of Nano Science & Technology, University of Seoul) ;
- Park, Kyoung-Wan (Department of Nano Science & Technology, University of Seoul)
- 발행 : 2007.08.15