한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2007년도 제33회 하계학술대회 초록집
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- Pages.295-295
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- 2007
In-situ FT-IR monitoring of a MOCVD process for the growth of Al film using aluminum boro-hydride trimethylamine
- Park, Young-Jae (UST) ;
- Yang, Jae-Young (Korea Research Institute of Standards and Science) ;
- Yun, Ju-Young (Korea Research Institute of Standards and Science) ;
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Kang, Sang-Woo
(Korea Research Institute of Standards and Science)
;
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Seong, Dae-Jin
(Korea Research Institute of Standards and Science)
;
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Shin, Yong-Hyun
(Korea Research Institute of Standards and Science)
;
- Yang, Il-Doo (Quleap) ;
- Shim, Jae-Yong (Quleap) ;
- Oh, Jae-Cheol (Quleap)
- 발행 : 2007.08.15