The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

  • Kim, G.C. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Jeon, H.H (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University, Department of mechanical and materials engineering, Florida International University) ;
  • Hwangboe, S.J. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Lee, J.S. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Kim, D.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
  • Choi, W.B. (Department of mechanical and materials engineering, Florida International University) ;
  • Jeon, M.H. (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
  • Published : 2007.08.15