Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
- /
- Pages.260-260
- /
- 2007
A Study on the Characteristics of Low Dielectric Constant SiOC(-H) Films Deposited with Various Substrate Temperature
- Kim, Seung-Hyun (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Kim, Chang-Young (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin film Material Laboratory, Department of Physics, Cheju National University) ;
- Choi, Chi-Kyu (Nano Thin film Material Laboratory, Department of Physics, Cheju National University)
- Published : 2007.08.15
Abstract
Keywords