Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Origin of the type-C defect on the Si(001) surface

  • Yu, Sang-Yong (Korea Research Institute of Standards and Science) ;
  • Kim, Han-Chul (Korea Research Institute of Standards and Science) ;
  • Koo, Ja-Yong (Korea Research Institute of Standards and Science)
  • Published : 2007.08.15
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