Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Surface chemistry studies of the ALD process of $ZrO_2$ thin films

  • Kim, Yu-Ri (Department of Chemistry Graduate School, Kyungpook National University) ;
  • Kim, Chang-Min (Department of Chemistry Graduate School, Kyungpook National University)
  • Published : 2007.08.15
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