Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Surface modification by low energy ion source with closed drift and extended acceleration region

  • 박동희 (한국과학기술연구원, 재료기술연구본부) ;
  • 최원국 (한국과학기술연구원, 재료기술연구본부)
  • Published : 2007.08.15
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Abstract

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