Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.88-88
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- 2007
Effect of annealing on RF sputtered aluminum nitride buffer layers for GaN growth
- Yang, J.H. (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
- Kang, S.M. (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Jung, C.H. (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
- Park, W.J. (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
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Yoon, D.H.
(SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University, School of Advanced Materials Science and Engineering, Sungkyunkwan University)
- Published : 2007.08.15
Abstract
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