Effect of annealing on RF sputtered aluminum nitride buffer layers for GaN growth

  • Yang, J.H. (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
  • Kang, S.M. (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Jung, C.H. (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University) ;
  • Park, W.J. (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Yoon, D.H. (SKKU Advanced Institute of Nanotechnology(SAINT), Sungkyunkwan University, School of Advanced Materials Science and Engineering, Sungkyunkwan University)
  • Published : 2007.08.15