Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
- /
- Pages.81-81
- /
- 2007
Temporal fluctuation of electron density measured by means of Wave-Cutoff method in Radio Frequency Capacitive Coupled Plasma
- Na, Byung-Keun (Korea Advanced Institute of Science and technology) ;
- Roh, Ki-Min (Korea Advanced Institute of Science and technology) ;
- Chang, Hong-Young (Korea Advanced Institute of Science and technology) ;
- Kim, Jung-Hyung (Korea Research Institute of Standards and Science)
- Published : 2007.08.15
Abstract
Keywords