한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.433-434
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- 2007
Ag 두께에 따라 코팅한 ZnO 박막의 특성
Properties of ZnO thin film coating Ag thickness
- 이지훈 (경원대학교 전기공학과) ;
-
임유승
(경원대학교 전기공학과)
;
- 김상모 (경원대학교 전기공학과) ;
- 금민종 (플라즈마 응용 표면기술 연구센터) ;
- 장경욱 (경원대학교 전기공학과) ;
- 김경환 (경원대학교 전기공학과)
- Lee, Ji-Hoon (Kyungwon University) ;
-
Rim, You-Seung
(Kyungwon University)
;
- Kim, Sang-Mo (Kyungwon University) ;
- Keum, Min-Jong (Center for Advanced Plasma Surface Technology.) ;
- Jang, Kyung-Wook (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University)
- 발행 : 2007.06.21
초록
We prepared ZnO thin films coating Ag on glass substrates at room temperature by using facing targets sputtering (FTS) method. ZnO thin films were deposited with same conditions. Ag with various thickness of thin films were used as intermediate layers. The electrical, optical and crystallographic properties of thin films were investigated by Four-Point probe, UV/VIS spectrometer and XRD. From the results, we could confirm that the thickness of Ag layer changes the electrical and optical performances of the multilayers.