한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
- /
- Pages.418-419
- /
- 2007
열 화학기상증착법을 이용한 탄소나노튜브 성장에 촉매 및 성장온도 영향
Effect of Fe catalyst and growth temperature on growth of carbon nanotubes by thermal CVD
- Heo, Sung-Taek (Kumoh National Institute of Technology) ;
- Yoon, Seung-Il (Kumoh National Institute of Technology) ;
- Lee, Yang-Kyu (Kumoh National Institute of Technology) ;
- Kim, Sam-Soo (Kumoh National Institute of Technology) ;
- Chun, Hyun-Tea (PDP Research Lab., LG Electronics Inc.) ;
- Lee, Dong-Gu (Kumoh National Institute of Technology)
- 발행 : 2007.06.21
초록
Effects of Fe catalyst film and carbon nanotube (CNT) growth temperature on the characteristics of carbon nanotube were investigated in thermal chemical vapor deposition (CVD) process. Fe catalyst was prepared by DC magnetron sputter with thickness of 5-40 nm and pre-treated with ammonia gas. CNTs were grown at