한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.370-371
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- 2007
p형 반전층을 갖는 ZnO계 자외선 수광소자의 설계 및 제작에 관한 연구
A Study on the Design and Fabrication of ZnO Based UV Photodetector with p-type Inversion Layer
- Oh, Sang-Hyun (School of Electrical Electronic and Information Engineering, Wonkwang Univ.) ;
- Jin, Hu-Jie (School of Electrical Electronic and Information Engineering, Wonkwang Univ.) ;
- Park, Choon-Bae (School of Electrical Electronic and Information Engineering, Wonkwang Univ.)
- 발행 : 2007.06.21
초록
To investigate the ZnO thin films which are interested in the next generation of short wavelength LEDs and Lasers and UV photodetector with p-type inversion layer, the ZnO thin films were deposited by. RF sputtering system. Substrate temperature and work pressure is