한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.338-338
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- 2007
글라스 기판위에 증착한 CdS 박막의 광전특성 평가
Photo-conductive properties of CdS thin film deposited on glass substrate
- Phuong, Nguyen Mai (Department of Nano Information Systems Engineering, Chungnam National University) ;
- Hur, Sung-Gi (Department of Nano Information Systems Engineering, Chungnam National University) ;
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Kim, Eui-Tae
(Department of Nano Information Systems Engineering, Chungnam National University) ;
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Yoon, Soon-Gil
(Department of Nano Information Systems Engineering, Chungnam National University)
- 발행 : 2007.06.21
초록
Photo-conductive properties of CdS films deposited on glass substrates by a reactive sputtering in Ar atmosphere were characterized as a function of working pressure and the film thickness. The XRD measurements of CdS films revealed obvious (002) preferred orientation. In 300nm-thick of films, difference between dark and photo-resistance increases with increasing working pressure within the films. The films at 5 mTorr of working pressure show a dark resistance of approximately