Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
- /
- Pages.283-283
- /
- 2007
Titanium nitride thin films for applications in thin film resistors
- Cuong, Nguyen Duy (Department of Materials Science and Engineering, Chungnam National University) ;
- Kim, Dong-Jin (KMC technology) ;
- Kang, Byoung-Don (Department of Materials Science and Engineering, Chungnam National University) ;
- Yoon, Soon-Gil (Department of Materials Science and Engineering, Chungnam National University)
- Published : 2007.06.21
Abstract
Titanium nitride thin films were deposited on