한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
- /
- Pages.133-134
- /
- 2007
열처리 조건에 따른 ZnO:Al 박막의 전기적 광학적 특성
Electrical and Optical properties of ZnO:Al films with Heat treatment
- Lee, Dong-Jin (Kunsan Nat. Univ.) ;
-
Lee, Jae-Hyeong
(Kunsan Nat. Univ.) ;
-
Sun, Ho-Jung
(Kunsan Nat. Univ.) ;
-
Lee, Jong-In
(Kunsan Nat. Univ.) ;
-
Jong, Dong-Su
(Kunsan Nat. Univ.) ;
- Song, Jun-Tae (Sungkyunkwan Univ.)
- 발행 : 2007.06.21
초록
We have studied the structural and electrical, optical properties of Al doped ZnO(AW) thin films which were fabricated by If reactive magnetron sputtering method with various heat treatment conditions. The heat temperatures of specimen fabrication were comning 7059 glass is