Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.133-134
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- 2007
Electrical and Optical properties of ZnO:Al films with Heat treatment
열처리 조건에 따른 ZnO:Al 박막의 전기적 광학적 특성
- Lee, Dong-Jin (Kunsan Nat. Univ.) ;
- Lee, Jae-Hyeong (Kunsan Nat. Univ.) ;
- Sun, Ho-Jung (Kunsan Nat. Univ.) ;
- Lee, Jong-In (Kunsan Nat. Univ.) ;
- Jong, Dong-Su (Kunsan Nat. Univ.) ;
- Song, Jun-Tae (Sungkyunkwan Univ.)
- Published : 2007.06.21
Abstract
We have studied the structural and electrical, optical properties of Al doped ZnO(AW) thin films which were fabricated by If reactive magnetron sputtering method with various heat treatment conditions. The heat temperatures of specimen fabrication were comning 7059 glass is