Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.47-47
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- 2007
Structural study of indium oxide thin films by metal organic chemical vapor deposition
저온화학기상증착에 의한 인듐산화막 구조에 관한 연구
- Pammi, S.Venkat.N. (Chungnam Univ.) ;
- Seong, Nak-Jin (Chungnam Univ. BK21) ;
- Yoon, Soon-Gil (Chungnam Univ. BK21)
- Published : 2007.06.21
Abstract
Indium oxide conducting films were dep9sited on Si(100) substrates at various temperatures by liquid delivery metal organic chemical vapor deposition using Indium (III) tris (2,2,6,6-tetramethyl-3.5-heptanedionato)