한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.42-42
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- 2007
유연성 전자소자 적용을 위한 BNO박막의 저온화학기상증착
Low Temperature Chemical Vapor Deposition of BNO Thin Films for Flexible Electronic Device Applications
- Jeon, Sang-Yong (Chungnam Univ.) ;
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Seong, Nak-Jin
(Chungnam Univ. BK21) ;
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Yoon, Soon-Gil
(Chungnam Univ. BK21)
- 발행 : 2007.06.21
초록
In the future, electronic components will be integrated on flexible polymer substrates and then miniaturized by thin films using suitable thin film technologies. In this article, the concept of a room temperature CVD is demonstrated using