한국정보디스플레이학회:학술대회논문집
- 2007.08a
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- Pages.91-94
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- 2007
In-Line Manufacturing Tool Using Linear Belt Source Evaporation for Large Size Lighting OLED and Flexible OLED
Abstract
We introduce the inline type mass production tool for the large size lighting OLEDs and flexible OLEDs. The manufacturing tool includes the linear belt source what is new concept for the organic deposition processes and the deposition operation combines directly to the encapsulation operation in a tool. The linear belt source evaporation in deposition processes is performed during the substrate transferring to innovatively improve the productivity in manufacturing.
Keywords