Challenges for large area processing equipment for TFT-LCD manufacturing

As the manufacturing capacity needs for large size LCD TV shifts very fast into next generation, equipment manufactures face more challenges in development of the systems which can accommodate productivity, reliability and high process quality requirements from the panel makers. AKT committed to continue its contribution to the growth of the LCD market by providing excellent PECVD products. The cost containment and performance improvement are key challenges for large size processing equipment development and this presentation discusses various challenges and AKT's solutions in developing large size PECVD equipment beyond Gen. 8.